cost-effective electron-beam lithography system designed for use in both industry and advanced research. Based on the Variable Shaped Beam (VSB) principle, these tools are utilized in a wide range of ...

Using the VSB tool, mask making was a relatively straightforward process until chipmakers began to push optical lithography beyond the wavelength of light. Today, chipmakers use 193nm wavelength ...

cost-effective electron-beam lithography system designed for use in both industry and advanced research. Based on the Variable Shaped Beam (VSB) principle, these tools are utilized in a wide range of ...